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[Lecture] Metal-Oxide Thin-Film Transistor: Technology, Modelling and Application to the Implementation of Intelligent Sensors
Jul. 25, 2023


Speaker: Prof. Wang Wen, The Hong Kong University of Science and Technology

Time: 10:00-11:30 a.m., July 25, 2023, GMT+8

Venue: Tecent Meeting ID: 258-696-999

Abstract:

Based on metal-oxide semiconductors, a 300-C, low-temperature thin-film transistor (TFT) technoloay is described. A kinetic model of the oxidation and reduction of intrinsic defects in metal- oxide semiconductors and its application to understanding the process-dependence othe behavior of TFTs are discussed. Such low-temperature technology enables a range of possystem on a flexible substrate and the sibilities including the realization of an electronic system on a flexible substrate and the monolithic integration of heterogeenous systems, such as the 3-dimensional stacking of TFTon conventional silicon transistors. A parallel, double-gate (DG) TFT with its channel sandwiched between two gate electrodes is also discussed. The threshold voltage of a DG TFT referenced to one electrode is modulated by the bias applied on the other electrode. Such behaviohas been beneficially exploited. A demonstration is described, applying such TFTs to the construction of a tactile sensor array and an artificial neural network. Monolithic integration of thetwo results in the realization of an "intelligent" sensor.

Biography:

From 1988 to 1992, Man Wong was with the Semiconductor Process and Design Center of Texas Instruments, USA and worked on the modeling and develonment of integrated-circuit metallization svstems and dry/vapor surface-conditioning processes. Since 1992, he has been with the Department of Electronic and Computer Engineering at The Hong Kong University of Science and Technology, Hong Kong. He was appointed the Director of the State Key Laboratory of Advanced Displays and Optoelectronics Technologies in 2021. He has served orjournal editorial boards, technical program committees, and as general chair of conferencesHe and his students have published about 550 journal and conference papers. For his contribution to education, he received the 2021 Society for lnformation Display Slottow-OwakPrize.

Source: School of Integrated Circuits